HAM5
In cleanroom
All...zero counts
In chamber start of work
0.3um..10 counts
0.5um...10 counts
0.7um..10 counts
1.0 um.....10 counts
remainder...zero counts
In chamber end of work
0.3um...75 counts
remainder zero counts
HAM4
In cleanroom
All zero counts
In chamber start of work
Dont know..Thomas took the measurement
In chamber end of work
All zero counts