HAM5

In cleanroom

All...zero counts

In chamber start of work

0.3um..10 counts

0.5um...10 counts

0.7um..10 counts

1.0 um.....10 counts

remainder...zero counts

In chamber end of work

0.3um...75 counts

remainder zero counts

HAM4

In cleanroom

All zero counts

In chamber start of work

Dont know..Thomas took the measurement

In chamber end of work

All zero counts