Particle counts taken during the installation of the Y-Arm Spool
Description/Location | 0.3 | 0.5 | 1.0 |
In cleanroom before moving spool | 13 | 6 | 0 |
During moving the spool | 69 | 31 | 6 |
At spool flange gap - air from inside tube | 35 | 20 | 12 |
At GV5 flange gap - air from inside tube | 11 | 9 | 5 |
While closing the sock | 64 | 40 | 12 |
In cleanroom after install complete | 170 | 107 | 40 |