Particle counts taken during the removal and reinstallation of the north HAM5 door.
Description/Location | 0.3 | 0.5 | 1.0 |
In cleanroom while breaking the door bolts | 66 | 28 | 15 |
In clenaroom with door loose and chamber open | 3 | 1 | 1 |
In chamber after door off | 30 | 11 | 2 |
In cleanroom while door being pulled back | 15 | 10 | 0 |
In chamber after work completed | 12 | 2 | 1 |
In cleanroom with door installed | 4 | 3 | 2 |