Particle counts taken during the installation of the BSC1 door.
Description/Location | 0.3 | 0.5 | 1.0 |
In cleanroom cover on | 13 | 8 | 1 |
In chamber cover 1/3 on people insdie chamber | 6 | 4 | 0 |
In chamber cover on inside work completed | 27 | 11 | 8 |
In cleanroom door on | 47 | 24 | 11 |