Time |
0.3µ |
0.5µ |
1.0µ |
Sampling Location |
16:45 |
940 |
660 |
580 |
In cleanroom - Breaking bolts |
16:49 |
1190 |
900 |
1420 |
In cleanroom - Breaking bolts |
17:00 |
4300 |
3310 |
2520 |
Top of door - Door loose on bolts, purge air venting |
17:02 |
100 |
30 |
30 |
Bottom of door - Door loose, purge air venting |
17:08 |
120 |
110 |
50 |
Side of door - Door loose, purge air venting |
17:10 |
320 |
240 |
260 |
In cleanroom - Door loose |
17:14 |
1520 |
1740 |
2110 |
In cleanroom - Door off, cover being put on |
17:19 |
540 |
640 |
360 |
In cleanroom - Cover on door and flange |
17:22 |
30 |
70 |
20 |
In cleanroom - Door out of cleanroom |
17:24 |
750 |
750 |
260 |
In chamber - Cover on |
17:31 |
470 |
590 |
120 |
In chamber - Cover on |
17:36 |
700 |
600 |
200 |
In chamber - Cover on |
17:41 |
310 |
330 |
140 |
In chamber - Cover on |