Locked down the HEPI on its hard stops while Isolated. Positions kept as close as possible. Here is where it ended up wrt the nominally servo position:
dof | delta |
X | 5.4um |
Y | 3.7um |
Z | -7.2um |
RX | 4.6urad |
RY | -0.6urad |
RZ | 4.6urad |
You can also see these on the HEPI CART BIAS medm accessed from the OVERVIEW; look for DC BIAS.