I have been starting to make some ESD actuation measurements while other measurements are ongoing. The idea is to measure 4 parameters in EQ 2 of G1600699 by putting an excitation onto the bias electrode with and without a bias, and onto the signal electrodes with and without a DC offset sent to the signal electrodes.
Jeff K kindly let me inject some lines during his calibration measurements today, and here are the results I get. I might have gotten some signs wrong, that needs to be double checked. These measurements could be scripted, and should not take more than 15 minutes per optic.
alpha | -2.7e-10 N/V^2 |
beta | -3.3e-9 N/V |
beta2 | -7e-9 N/V |
gamma | 8.45e-11N/V^2 |
Veff=(beta-beta2)/(2(alpha-gamma)) | -5.2 V |