All the HEPIs in the LVEA are now locked as close as possible to Target Location.
| Cham | DOF | X | Y | Z | RX | RY | RZ |
| HAM1 | -0.4 | -2.1 | 0.5 | 0.5 | -1.6 | -2.2 | |
| HAM2 | 2.6 | 2.1 | 0.5 | 0.5 | -1.3 | -1.3 | |
| HAM3 | -0.1 | -12.5 | 0.4 | -0.2 | 0.4 | -0.5 | |
| HAM4 | -6.1 | 0.9 | -0.4 | 2.3 | -0.04 | -0.6 | |
| HAM5 | 0.9 | -1.0 | -0.5 | 0.6 | 0.06 | 0.7 | |
| HAM6 | -6.8 | 0.7 | 3.5 | 1.1 | 1.5 | -0.2 | |
| ITMY | -0.2 | 15.4 | 10.3 | -6.8 | -6.6 | -0.5 | |
| BS | 4.0 | 1.4 | 9.6 | 1.5 | -3.4 | 1.3 | |
| ITMX | -2.8 | 1.4 | 19.6 | -10.9 | 8.0 | -1.9 | |
These values are available on the DC BIAS medm from each HEPI chamber overview.