I had a little time to investigate the seemingly inadequate purge-air issue after the in-chamber folks were done for the evening and all of the soft covers were on.  Nothing definitive was determined but perhaps one clue was added.  I'll need to have a second person to confirm (one in LVEA and one at the Kobelco) but tonight it seems that the frequency of "low flow" is greater than the drying tower switching frequency.  If so, my original observation was wrong.  

For tonight, I increased the pressure setpoint at which the compressor loads from 80 psi to 90 psi..  This will only help if the issue isn't drying tower dependent.  Chandra and I should be able to investigate tomorrow but we may need to shut off the system.  

As an aside, I noticed that none of the lights are working on the HAM1/HAM2 or HAM3 clean rooms?  Both appear to be plugged in and, for the case of the HAM3 clean room, the breaker isn't tripped.