Temperature ramp down on CP4 bake is looking good. Currently at 90C.
Pressure is dropping as CP4 cools: 3e-7 Torr. As Kyle pointed out, the read back from Inficon hot cathode/pirani full range gauge has been noisy ever since the pressure spike from turbo controller trip (we suspect these Japanese turbo controllers are extra sensitive to spikes in line voltage from power cycling nearby inductors (i.e. large variac), because the turbo + cart are plugged into a 480V step-down transformer supplying many 120V outlets). These gauges change emission current at 5.6e-6 Torr and cause a large step down in pressure, as observed in corner and end station volumes. This gauge stepped down at around 3e-6 Torr. Note that it has been exposed to relatively high temperatures for two months. Manufacture spec for bake out is 80C.
Attached are 30 day and 90 day trends.
Ramp down still looking good. Attached are temperature and pressure trends over 3 days.