CPS Z/RX/RY location residuals are all <15 micron/microradians indicating the table hasn't move much since they were last zero'd (around the time of the last closeout). Today's transfer functions (first image) look much like the Apr 26th measurements (second). I also replaced the 4" cc sample on the table earlier today. Think the chamber is good to close up.
I should mention, I left the ISI unlocked.