On site now. Will head out to lock HAM 6 HEPI and disable the ISI to disconnect cables from feedthrus. Will comment here when complete.
Completed:
Locked HEPI while isolated. Off in Z about 50um, others DOFs better. ISI OFFLINE with corner 3 Sensor and coil driver chassis powered down. Corner 3 Actuator cables disconnected from chamber feed thru. CPS cables left attached for their protection.
Clean room running now. Leaving site.
Completed:
Locked HEPI while isolated. Off in Z about 50um, others DOFs better. ISI OFFLINE with corner 3 Sensor and coil driver chassis powered down. Corner 3 Actuator cables disconnected from chamber feed thru. CPS cables left attached for their protection.
Clean room running now. Leaving site.