After everyone was done at HAM5/6/7 chambers, and with soft covers on HAM5 and HAM6, I closed the purge air to HAM7 and closed the relay tube gate valve, aluminum foil was restored to cover the entire bellows port. HAM6 purge was closed via its purge valve.
HAM5 and HAM6 are currently being purged on a dialed back flow from the purge valve near HAM4 that feeds the ourput mode cleaner tube, soft covers are billowing out. Flow needs to be restored before any activities take place on any of the 3 chambers.