Time P.Counts 0.3 0.5 1 Notes 1035 0 0 0 Outside chamber (pulling the door) 1050 10 0 0 In-chamber (covers not fitted) 1057 170 40 30 In-chamber (re-aligning M3 & inspecting EQ stops) 1110 30 20 10 In-chamber (during TF measurement) 1113 20 10 0 In-chamber (after TF measurement) 1119 0 0 0 Outside chamber (door being installed) 1126 HAM5 south door hung