Time P.Counts 0.3 0.5 1 Notes 1300 0 0 0 HAM3 E-side clean room 1305 25 21 5 In-chamber (covers on) 1321 355 190 42 In-chamber (after wafer swap) 1322 Chamber seal covers removed 1332 54 104 16 In-chamber (waiting...) 1335 10 6 4 In-chamber (Good to go for PR2 FC removal) 1336 66 42 2 In-chamber (Pulling first contact from PR2) 1340 2-3 & 4-5 o'clock FC residue, nothing noticeable in the center, but couple of particulates on backside 1351 TFs underway 1401 TFs complete 1405 Unlocked ISI HAM3E-side (inspection of zero particulate with green light) 1409 2467 1934 1349 In-chamber (covers on) 1411 44 30 10 In-chamber (covers on) 1418 1 1 0 HAM3 W-side clean-room 1419 17 7 1 In-chamber (Good to go for MC2 FC removal) 1420 Peeling FC & Change-out nitrogen bottle 1425 Door HAM3 E-side on 1426 436 260 61 In-chamber 1430 No FC reside or obvious particulate on MC2 1435 TFs underway 1145 TFs complete 1446 Optics inspection of MC2 estimates 1-2 particles per square inch 1448 77 54 14 In-chamber 1452 152 88 26 Clean room (Door off) 1510 15 6 0 Clean room (Door almost on) 1514 84 55 24 Clean room (Door almost on) 1515 Door HAM3 W-side on