Time P.Counts(um)0.3 0.5 1 Notes 1055 Begin to unlock the QUAD 1103 350 In-chamber 1105 PET swipe of TMSX upper structure 1107 PET swipe of floor 1108 New 4" wafer installed 1122 O2 at 20% at start of pulling first contact from witness plate 1123 1020 In-chamber 1125 Start pulling first contact on ERM 1128 Top gun blowing & between 1130 Inspection of ERM first contact residue at (Danny will provide a map) 1132 Particulates estimated 0-1 per sq. inch on ERM surface 1136 810 In-chamber (5-6th go between gap) 1140 O2 at 20% at end of ERM blowing 1140 Inspection under green light estimate 2-3 per square inch on ERM surface 1142 Start pulling first contact on HR side 1142 630 In-chamber (near optic) 1145 Particulates estimated 3-7 per sq. inch on HR surface 1150 Particulates still estimated 3-7 per sq. inch on HR surface 1152 670 In-chamber (5-6th go between gap) 1156 O2 at 21% at end of HR blowing 1157 Particulates estimated 3-7 per sq. inch on HR surface 1157 Particulates estimated 0-1 per sq. inch on ERM surface 1158 630 In-chamber 1159 Baffle released 1211 Unlocking optics 1212 970 In-chamber 1220 OSEM alignment under-way 1238 Completed OSEM alignment 1240 910 In-chamber 1258 490 In-chamber (exiting) 1258 TFs Started on M0 & R0 T, V & P DOFs 1308 TFs Complete 1310 Door going on 1315 Door on