ZM4:
  ZM4 PZT [V]: [0.0, 30.0, 60.0, 80.0, 100.0, 116.0, 100.0, 80.0, 60.0, 30.0, 0.0]
  ZM4 strain gauge [V]: [11.05, 10.53, 9.9, 9.44, 8.99, 8.57, 8.8, 9.14, 9.53, 10.23,
    11.01]
  defocus X [mD]: [113.47231800875662, 132.1589566580998, 155.6066149794448, 171.94302214146248,
    188.24446131542956, 203.8751389143478, 195.90407452588593, 182.49490538868898,
    169.0627135934632, 143.41067322675585, 115.40785217540261]
  defocus Y [mD]: [109.2326487434427, 123.70118708378456, 140.3825408122144, 152.22826755299067,
    162.7773626997147, 171.71661685261554, 166.60974618298823, 159.26264525037325,
    150.62861559946285, 132.68838213374252, 110.19819165057982]
  diam X [um]: [3690.0, 3748.0, 3821.0, 3872.0, 3923.0, 3972.0, 3947.0, 3905.0, 3863.0,
    3783.0, 3696.0]
  diam Y [um]: [3699.0, 3744.0, 3796.0, 3833.0, 3866.0, 3894.0, 3878.0, 3855.0, 3828.0,
    3772.0, 3702.0]
ZM4_E2100289:
  mD: [-103.800996131396, -107.645465771103, -112.018078519906, -116.771492478082,
    -121.820446874656, -127.067486431219, -132.696939694006, -138.417247076218, -144.215231455155,
    -150.264412609098, -156.266932135427, -162.601222888765, -169.194394972413, -175.591799860295,
    -182.126468542582, -188.838763831068, -195.792404546613, -202.772878217563, -209.49658696032,
    -216.753704622199, -221.003692024568, -221.739015783701, -219.512384390403, -215.401978746664,
    -210.948388421645, -206.189759043968, -201.161716715926, -195.990514901867, -190.506060379317,
    -184.881419411819, -179.123671868357, -173.536067937896, -167.586735612373, -161.306891823005,
    -155.16909892807, -148.75929797065, -142.307975219327, -135.557559497483, -128.67063583913,
    -121.30034105455, -113.460860076974, -105.945894090579, -105.309109006175, -109.081016287606,
    -113.460356171708, -118.107773657221, -123.157408325903, -128.360280585918, -133.830701346815,
    -139.490943221343, -145.401953551401, -151.247330220587, -157.263707141726, -163.663102455407,
    -169.935085322628, -176.347456196903, -183.083737376042, -189.829315607334, -196.587844203958,
    -203.332918529985, -210.22208456677, -217.075473329682, -221.273306537039]
  pztV: [0.0, 10.0, 20.0, 30.0, 40.0, 50.0, 60.0, 70.0, 80.0, 90.0, 100.0, 110.0,
    120.0, 130.0, 140.0, 150.0, 160.0, 170.0, 180.0, 190.0, 200.0, 200.0, 190.0, 180.0,
    170.0, 160.0, 150.0, 140.0, 130.0, 120.0, 110.0, 100.0, 90.0, 80.0, 70.0, 60.0,
    50.0, 40.0, 30.0, 20.0, 10.0, -0.0, 0.0, 10.0, 20.0, 30.0, 40.0, 50.0, 60.0, 70.0,
    80.0, 90.0, 100.0, 110.0, 120.0, 130.0, 140.0, 150.0, 160.0, 170.0, 180.0, 190.0,
    200.0]
  sgV: [7.86, 7.7, 7.53, 7.35, 7.17, 6.97, 6.76, 6.55, 6.33, 6.09, 5.86, 5.62, 5.37,
    5.12, 4.87, 4.62, 4.36, 4.1, 3.84, 3.567, 3.403, 3.362, 3.436, 3.572, 3.721, 3.881,
    4.052, 4.22, 4.41, 4.61, 4.82, 5.03, 5.25, 5.5, 5.74, 6.0, 6.26, 6.54, 6.82, 7.12,
    7.44, 7.75, 7.78, 7.63, 7.46, 7.29, 7.1, 6.91, 6.71, 6.49, 6.27, 6.04, 5.81, 5.56,
    5.33, 5.08, 4.82, 4.57, 4.31, 4.06, 3.8, 3.542, 3.38]
ZM5:
  ZM4 PZT [V]: [0.0, 0.0, 0.0, 0.0, 0.0, 0.0, 0.0, 0.0, 0.0, 100.0, 100.0, 100.0,
    100.0, 100.0, 100.0, 100.0, 100.0, 100.0]
  ZM4 defocus X [mD]: [113.0, 113.0, 113.0, 113.0, 113.0, 113.0, 113.0, 113.0, 113.0,
    188.0, 188.0, 188.0, 188.0, 188.0, 188.0, 188.0, 188.0, 188.0]
  ZM4 defocus Y [mD]: [109.0, 109.0, 109.0, 109.0, 109.0, 109.0, 109.0, 109.0, 109.0,
    182.0, 182.0, 182.0, 182.0, 182.0, 182.0, 182.0, 182.0, 182.0]
  ZM4 strain gauge [V]: [11.03, 11.03, 11.03, 11.03, 11.03, 11.03, 11.03, 11.03, 11.03,
    8.97, 8.97, 8.97, 8.97, 8.97, 8.97, 8.97, 8.97, 8.97]
  ZM5 PZT [V]: [0.0, 25.0, 50.0, 75.0, 100.0, 117.0, 100.0, 50.0, 0.0, 0.0, 25.0,
    50.0, 75.0, 100.0, 117.0, 100.0, 50.0, 0.0]
  ZM5 defocus X [mD]: [-602.2129239079547, -592.1131656257173, -578.9267948566546,
    -563.7078354662422, -547.7971779218037, -536.8771064453299, -545.6741770394856,
    -570.9694991554286, -602.0439353341246, -609.1481997301614, -600.7746011228435,
    -587.6727413246429, -573.5865293580118, -557.4606547530025, -546.562075098599,
    -553.671734814641, -580.6182578394087, -608.8373117488075]
  ZM5 defocus Y [mD]: [-607.6637433122826, -597.054275680317, -585.1994589648868,
    -571.1294898701979, -555.8656506398947, -544.7792549562294, -552.1092887369277,
    -578.8940271432282, -607.3255016688747, -615.9539330018774, -606.4701381637335,
    -592.420802970132, -578.3204603072122, -563.8531435679865, -552.9429079133947,
    -560.9697656208809, -585.2054217643783, -615.3302598646305]
  ZM5 q_X:
    imag: [1.1590556196444435, 1.232350911190794, 1.3383378746031684, 1.4773702474266759,
      1.645341440436229, 1.7763285691397668, 1.6697358504620083, 1.4086188055863953,
      1.160230320773537, 1.1060176156943635, 1.1664183656679203, 1.270832705259075,
      1.3986250167077408, 1.5684869965365786, 1.7001755431593917, 1.6125925873120095,
      1.3326544130611002, 1.10817891329077]
    real: [-2.996555103263312, -3.07519826286604, -3.1825026822971196, -3.3128681550023877,
      -3.4563782603278974, -3.55878494234465, -3.4760526770148337, -3.249799829928612,
      -2.997845912175122, -3.1384051463811256, -3.212013434361329, -3.3328497321180746,
      -3.47075496342526, -3.639053250043353, -3.7590768852991636, -3.6802128942803742,
      -3.4008618717073893, -3.1410888383742255]
  ZM5 q_Y:
    imag: [1.1223601508058663, 1.1957423997848338, 1.2860746628829505, 1.406329473228781,
      1.5554457519116098, 1.6779206131692606, 1.5955099980393546, 1.3380975042531795,
      1.1245992699347866, 1.0608813161180302, 1.125249256049551, 1.231384850265504,
      1.3528960599016349, 1.4960695678473752, 1.6185945625789089, 1.5271457815577425,
      1.2915274175863851, 1.0649493756740918]
    real: [-2.9448970535845977, -3.025176560209036, -3.11879513778069, -3.2353176737949814,
      -3.3682647563138985, -3.468864248460814, -3.401985841608995, -3.1702890056628013,
      -2.947405995416172, -3.065748060035886, -3.145893338735975, -3.2709969451332093,
      -3.4045310678939886, -3.5501073448946534, -3.665668411293747, -3.5801673153014293,
      -3.33831095096969, -3.070915109118667]
  ZM5 strain gauge [V]: [-8.68, -9.1, -9.6, -10.16, -10.73, -11.16, -10.89, -9.9,
    -8.68, -8.68, -9.08, -9.62, -10.16, -10.74, -11.15, -10.89, -9.9, -8.68]
  diam X [um]: [1710.0, 1770.0, 1849.0, 1941.0, 2038.0, 2105.0, 2051.0, 1897.0, 1711.0,
    1821.0, 1875.0, 1960.0, 2052.0, 2158.0, 2230.0, 2183.0, 2006.0, 1823.0]
  diam Y [um]: [1681.0, 1744.0, 1815.0, 1900.0, 1993.0, 2061.0, 2016.0, 1853.0, 1683.0,
    1777.0, 1838.0, 1929.0, 2021.0, 2116.0, 2188.0, 2135.0, 1976.0, 1781.0]
ZM5_E2100291:
  mD: [651.041666666667, 644.745325596389, 639.386189258312, 633.312222925902, 626.959247648903,
    619.962802231866, 613.120784794605, 605.326876513317, 597.014925373134, 589.275191514437,
    581.73356602676, 573.065902578797, 566.251415628539, 558.347292015634, 549.450549450549,
    542.005420054201, 534.473543559594, 525.486074619023, 517.866390471258, 511.247443762781,
    507.356671740233, 507.356671740233, 509.164969450102, 514.13881748072, 517.5983436853,
    522.193211488251, 527.426160337553, 535.045478865704, 541.125541125541, 548.245614035088,
    555.555555555556, 562.429696287964, 569.313976658127, 579.710144927536, 587.544065804935,
    595.592614651578, 604.229607250755, 613.873542050338, 621.504039776259, 631.711939355654,
    640.204865556978, 648.929266709929]
  pztV: [0.0, 10.0, 20.0, 30.0, 40.0, 50.0, 60.0, 70.0, 80.0, 90.0, 100.0, 110.0,
    120.0, 130.0, 140.0, 150.0, 160.0, 170.0, 180.0, 190.0, 195.0, 195.0, 190.0, 180.0,
    170.0, 160.0, 150.0, 140.0, 130.0, 120.0, 110.0, 100.0, 90.0, 80.0, 70.0, 60.0,
    50.0, 40.0, 30.0, 20.0, 10.0, -0.0]
  sgV: [-8.92, -9.08, -9.26, -9.47, -9.67, -9.89, -10.13, -10.38, -10.63, -10.88,
    -11.15, -11.42, -11.7, -11.97, -12.28, -12.55, -12.83, -13.14, -13.46, -13.74,
    -13.92, -13.93, -13.86, -13.7, -13.53, -13.34, -13.15, -12.94, -12.73, -12.49,
    -12.26, -12.01, -11.78, -11.43, -11.16, -10.89, -10.6, -10.29, -10.01, -9.65,
    -9.32, -8.98]