ZM4: H or V: [V, H, H, V, H, H, H, H, V, V, V, V, V, H] ZM4 PZT [V]: [100.0, 100.0, 0.0, 0.0, 33.5, 67.0, 99.7, 117.8, 117.8, 99.7, 67.0, 33.7, 1.6, 1.6] ZM4 strain gauge [V]: [8.73, 8.73, 10.81, 10.81, 10.25, 9.57, 8.79, 8.37, 8.37, 8.63, 9.22, 9.97, 10.8, 10.8] defocus X [mD]: [168.00205573019198, 172.87354677367446, 112.12086749205255, 113.52279761224779, 126.82811663151469, 152.3246731436511, 170.43814654667287, 181.91334763682264, 185.38772182657553, 178.0899570149775, 163.8242802339643, 142.903933961488, 117.72700856083944, 112.82186560943458] defocus Y [mD]: [154.0633826647901, 162.4035626299944, 110.1371631722374, 104.89129719573484, 122.71244989637736, 139.44804701241722, 162.05621786965878, 173.85814089664692, 175.59237829895935, 169.34752670937925, 155.1063537276623, 132.827747830152, 108.38894946170953, 107.68954996131995] diam X [um]: [3670.0, 3684.0, 3510.0, 3514.0, 3552.0, 3625.0, 3677.0, 3710.0, 3720.0, 3699.0, 3658.0, 3598.0, 3526.0, 3512.0] diam Y [um]: [3651.0, 3675.0, 3525.0, 3510.0, 3561.0, 3609.0, 3674.0, 3708.0, 3713.0, 3695.0, 3654.0, 3590.0, 3520.0, 3518.0] ZM4_E2100289: mD: [-103.800996131396, -107.645465771103, -112.018078519906, -116.771492478082, -121.820446874656, -127.067486431219, -132.696939694006, -138.417247076218, -144.215231455155, -150.264412609098, -156.266932135427, -162.601222888765, -169.194394972413, -175.591799860295, -182.126468542582, -188.838763831068, -195.792404546613, -202.772878217563, -209.49658696032, -216.753704622199, -221.003692024568, -221.739015783701, -219.512384390403, -215.401978746664, -210.948388421645, -206.189759043968, -201.161716715926, -195.990514901867, -190.506060379317, -184.881419411819, -179.123671868357, -173.536067937896, -167.586735612373, -161.306891823005, -155.16909892807, -148.75929797065, -142.307975219327, -135.557559497483, -128.67063583913, -121.30034105455, -113.460860076974, -105.945894090579, -105.309109006175, -109.081016287606, -113.460356171708, -118.107773657221, -123.157408325903, -128.360280585918, -133.830701346815, -139.490943221343, -145.401953551401, -151.247330220587, -157.263707141726, -163.663102455407, -169.935085322628, -176.347456196903, -183.083737376042, -189.829315607334, -196.587844203958, -203.332918529985, -210.22208456677, -217.075473329682, -221.273306537039] pztV: [0.0, 10.0, 20.0, 30.0, 40.0, 50.0, 60.0, 70.0, 80.0, 90.0, 100.0, 110.0, 120.0, 130.0, 140.0, 150.0, 160.0, 170.0, 180.0, 190.0, 200.0, 200.0, 190.0, 180.0, 170.0, 160.0, 150.0, 140.0, 130.0, 120.0, 110.0, 100.0, 90.0, 80.0, 70.0, 60.0, 50.0, 40.0, 30.0, 20.0, 10.0, -0.0, 0.0, 10.0, 20.0, 30.0, 40.0, 50.0, 60.0, 70.0, 80.0, 90.0, 100.0, 110.0, 120.0, 130.0, 140.0, 150.0, 160.0, 170.0, 180.0, 190.0, 200.0] sgV: [7.86, 7.7, 7.53, 7.35, 7.17, 6.97, 6.76, 6.55, 6.33, 6.09, 5.86, 5.62, 5.37, 5.12, 4.87, 4.62, 4.36, 4.1, 3.84, 3.567, 3.403, 3.362, 3.436, 3.572, 3.721, 3.881, 4.052, 4.22, 4.41, 4.61, 4.82, 5.03, 5.25, 5.5, 5.74, 6.0, 6.26, 6.54, 6.82, 7.12, 7.44, 7.75, 7.78, 7.63, 7.46, 7.29, 7.1, 6.91, 6.71, 6.49, 6.27, 6.04, 5.81, 5.56, 5.33, 5.08, 4.82, 4.57, 4.31, 4.06, 3.8, 3.542, 3.38] ZM5: ZM4 PZT [V]: [0.0, 0.0, 0.0, 0.0, 0.0, 0.0, 0.0, 0.0, 0.0, 100.0, 100.0, 100.0, 100.0, 100.0, 100.0, 100.0, 100.0, 100.0] ZM4 defocus X [mD]: [113.0, 113.0, 113.0, 113.0, 113.0, 113.0, 113.0, 113.0, 113.0, 170.0, 170.0, 170.0, 170.0, 170.0, 170.0, 170.0, 170.0, 170.0] ZM4 defocus Y [mD]: [109.0, 109.0, 109.0, 109.0, 109.0, 109.0, 109.0, 109.0, 109.0, 162.0, 162.0, 162.0, 162.0, 162.0, 162.0, 162.0, 162.0, 162.0] ZM4 strain gauge [V]: [11.03, 11.03, 11.03, 11.03, 11.03, 11.03, 11.03, 11.03, 11.03, 8.97, 8.97, 8.97, 8.97, 8.97, 8.97, 8.97, 8.97, 8.97] ZM5 PZT [V]: [0.0, 25.0, 50.0, 75.0, 100.0, 117.0, 100.0, 50.0, 0.0, 0.0, 25.0, 50.0, 75.0, 100.0, 117.0, 100.0, 50.0, 0.0] ZM5 defocus X [mD]: [-654.8133077101725, -642.9457312734896, -627.4029114732045, -609.4052540732307, -590.5318430098234, -577.5487264331402, -588.0095349911257, -618.0000576784507, -654.6150287407372, -655.763480396216, -645.6860896172473, -629.8862400588846, -612.860996032525, -593.3286971268715, -580.1059273741444, -588.7336460551567, -621.3644766054144, -655.3896455530789] ZM5 defocus Y [mD]: [-661.3006990622907, -648.8484335319313, -634.8902496253359, -618.2711189086901, -600.1860474528187, -587.018951545143, -595.7274776125346, -627.4490278537157, -660.9043362251598, -663.2476799966141, -651.828681172475, -634.8724127531752, -617.8128161900488, -600.2719687381032, -587.0221322668144, -596.7719901378914, -626.1475570030896, -662.4974766100095] ZM5 q_X: imag: [0.8625203527437383, 0.9189786008471476, 1.0013296531323945, 1.1105911762127256, 1.244419686435583, 1.3501500361410625, 1.2640198282739536, 1.056388583897108, 0.8634219561414698, 0.8443345062042361, 0.8929082190402591, 0.9776095958263913, 1.0824996412629269, 1.223942752709576, 1.335150394613076, 1.261039386868591, 1.0281861372387402, 0.8460671278342627] real: [-2.6339734275644817, -2.7092550187001, -2.8134242926668938, -2.942398142912787, -3.0877887549265615, -3.194020608808535, -3.1080276578479373, -2.8796570921544986, -2.6352020301084833, -2.7405188278821693, -2.8105408407543786, -2.9267128752646534, -3.061230712533087, -3.2283865330477086, -3.349774456414834, -3.269800533597753, -2.992789529912508, -2.743062044828333] ZM5 q_Y: imag: [0.8347884364445196, 0.8911750905332393, 0.9611543626988701, 1.0552536345491021, 1.173386905337608, 1.271595103279232, 1.2053963823353573, 1.001732297378666, 0.8365026753260696, 0.8127430923646141, 0.8646958639270558, 0.9511744983432722, 1.051381767209299, 1.1710443780237985, 1.274781301129651, 1.1972401958705854, 1.0006150867006591, 0.8160151851295695] real: [-2.586586260038636, -2.6630978308342885, -2.753494786910405, -2.8678745582441745, -3.0011373869874975, -3.1041557558738258, -3.0354478641801736, -2.803777863491245, -2.5889637534591996, -2.6754366580221762, -2.7514713370608965, -2.8714938474910316, -3.0014647740801967, -3.145471763620144, -3.2616268482856055, -3.175524332396883, -2.936765760732933, -2.68031884105726] ZM5 strain gauge [V]: [-8.68, -9.1, -9.6, -10.16, -10.73, -11.16, -10.89, -9.9, -8.68, -8.68, -9.08, -9.62, -10.16, -10.74, -11.15, -10.89, -9.9, -8.68] diam X [um]: [1710.0, 1770.0, 1849.0, 1941.0, 2038.0, 2105.0, 2051.0, 1897.0, 1711.0, 1821.0, 1875.0, 1960.0, 2052.0, 2158.0, 2230.0, 2183.0, 2006.0, 1823.0] diam Y [um]: [1681.0, 1744.0, 1815.0, 1900.0, 1993.0, 2061.0, 2016.0, 1853.0, 1683.0, 1777.0, 1838.0, 1929.0, 2021.0, 2116.0, 2188.0, 2135.0, 1976.0, 1781.0] ZM5_E2100291: mD: [651.041666666667, 644.745325596389, 639.386189258312, 633.312222925902, 626.959247648903, 619.962802231866, 613.120784794605, 605.326876513317, 597.014925373134, 589.275191514437, 581.73356602676, 573.065902578797, 566.251415628539, 558.347292015634, 549.450549450549, 542.005420054201, 534.473543559594, 525.486074619023, 517.866390471258, 511.247443762781, 507.356671740233, 507.356671740233, 509.164969450102, 514.13881748072, 517.5983436853, 522.193211488251, 527.426160337553, 535.045478865704, 541.125541125541, 548.245614035088, 555.555555555556, 562.429696287964, 569.313976658127, 579.710144927536, 587.544065804935, 595.592614651578, 604.229607250755, 613.873542050338, 621.504039776259, 631.711939355654, 640.204865556978, 648.929266709929] pztV: [0.0, 10.0, 20.0, 30.0, 40.0, 50.0, 60.0, 70.0, 80.0, 90.0, 100.0, 110.0, 120.0, 130.0, 140.0, 150.0, 160.0, 170.0, 180.0, 190.0, 195.0, 195.0, 190.0, 180.0, 170.0, 160.0, 150.0, 140.0, 130.0, 120.0, 110.0, 100.0, 90.0, 80.0, 70.0, 60.0, 50.0, 40.0, 30.0, 20.0, 10.0, -0.0] sgV: [-8.92, -9.08, -9.26, -9.47, -9.67, -9.89, -10.13, -10.38, -10.63, -10.88, -11.15, -11.42, -11.7, -11.97, -12.28, -12.55, -12.83, -13.14, -13.46, -13.74, -13.92, -13.93, -13.86, -13.7, -13.53, -13.34, -13.15, -12.94, -12.73, -12.49, -12.26, -12.01, -11.78, -11.43, -11.16, -10.89, -10.6, -10.29, -10.01, -9.65, -9.32, -8.98]